| 摘要 |
An actuator device including vibration plates formed on one side of a substrate; and piezoelectric elements mounted through the vibration plates and each including a lower electrode, a piezoelectric layer, and an upper electrode, wherein a ratio d31/S11E of a piezoelectric constant d31 of the piezoelectric layer to an elastic compliance S11E of the piezoelectric layer is greater than 5 C/m2, and the elastic compliance S11E of each vibration plate is greater than 2x10-8 m2/N.
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