发明名称 Method for fabricating an electrical component
摘要 An electrical component, such as a DRAM semiconductor memory or a field-effect transistor is fabricated. At least one capacitor having a dielectric (130) and at least one connection electrode (120, 140) are fabricated. To enable the capacitors fabricated to have optimum storage properties even for very small capacitor structures, the dielectric (130) or the connection electrode (120, 140) are formed in such a manner that transient polarization effects are prevented or at least reduced.
申请公布号 US7531406(B2) 申请公布日期 2009.05.12
申请号 US20060399811 申请日期 2006.04.07
申请人 INFINEON TECHNOLOGIES AG 发明人 AVELLAN ALEJANDRO;HECHT THOMAS;JAKSCHIK STEFAN;SCHROEDER UWE
分类号 H01L21/8234 主分类号 H01L21/8234
代理机构 代理人
主权项
地址