| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device, equipped with an acceleration sensor and an MEMS (micro electro-mechanical systems) sensor usable as a pressure sensor. <P>SOLUTION: In this semiconductor device 1, the MEMS sensor 5, equipped with four lower thin films 6 (lower electrodes 8) and four upper thin films 7 (upper electrodes 11) is provided on a semiconductor substrate 2. The upper thin films 7 are provided so as to be able to respectively vibrate, and the lower thin films 6 are arranged opposite, at prescribed intervals to the upper thin film 7, respectively. <P>COPYRIGHT: (C)2009,JPO&INPIT |
