| 摘要 |
Droplets of a liquid are ejected through a plurality of nozzles to a plurality of coating regions on a substrate based on nozzle information including the ejection amount of a droplet of the liquid ejected through each nozzle. According to arrangement information for disposing the liquid, a plurality of droplet groups are disposed in each coating region while the plurality of nozzles and the substrate are scanned for relative movement. A calculation is performed according to the nozzle information and the arrangement information. Adjustment amount is calculated so that the assigned adjustment amounts vary from one droplet group to another. Driving signals, which drive selected nozzles, are set so that combinations of the driving signals give coating amounts that have taken the assigned adjustment amounts into account.
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