发明名称 NONVOLATILE MEMORY DEVICE HAVING CHARGE TRAPPING LAYER AND METHOD FOR FABRICATING THE SAME
摘要 Disclosed herein is a nonvolatile memory device having a charge trapping layer and a method of making the same. The nonvolatile memory device includes a substrate, a tunneling layer disposed on the substrate, a charge trapping layer disposed on the tunneling layer, a first blocking layer disposed on the charge trapping layer, a second blocking layer disposed on the first blocking layer, and a control gate electrode disposed on the second blocking layer. A first band gap between the first blocking layer and the charge trapping layer is larger than a second band gap between the second blocking layer and the charge trapping layer.
申请公布号 US2009114977(A1) 申请公布日期 2009.05.07
申请号 US20080147177 申请日期 2008.06.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK KI SEON;JOO MOON SIG;KIM YONG TOP;PARK JAE YOUNG;LEE KI HONG
分类号 H01L29/792;H01L21/28 主分类号 H01L29/792
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