| 摘要 |
<P>PROBLEM TO BE SOLVED: To mitigate the burden on a worker by improving operation efficiency during maintenance of an optical element group by reducing footprints, shortening an optical path length, and centralizing and disposing the optical element group at one place when a laser device composed of many amplifier units is disposed on a floor of a semiconductor manufacturing line etc., and to stabilize a laser output for a long period by reducing an influence of vibrations etc. <P>SOLUTION: An oscillator units 11 and amplifier units 21 and 22 are arranged so that respective wide-area surfaces 11A and 21A and 22A except minimum-area surfaces of a housing of the oscillator unit 11 and a housing of at least one amplifier unit 21 or 22 are adjacent and opposed to each other. Amplifier units 23 and 24 are arranged so that wide-area surfaces 23A and 24A except minimum-area surfaces of housings of two amplifier units 23 and 24 are adjacent and opposed to each other. The optical element group 31 is disposed on an integrally formed plate 32 to constitute an optical element module 30. <P>COPYRIGHT: (C)2009,JPO&INPIT |
