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发明名称
ROTARY OPTICAL ENCODER EMPLOYING MULTIPLE SUB-ENCODERS WITH COMMON RETICLE SUBSTRATE
摘要
申请公布号
KR20090045357(A)
申请公布日期
2009.05.07
申请号
KR20097005706
申请日期
2007.08.02
申请人
GSI GROUP CORPORATION
发明人
SIDOR KURT;HINRICHS KEITH M.
分类号
G01D5/347;G01D5/34
主分类号
G01D5/347
代理机构
代理人
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