| 摘要 |
PROBLEM TO BE SOLVED: To utilize a total reflection, and switch various measurements. SOLUTION: An optical measurement apparatus 1 is provided with a light source 3, a measurement optical system 2, and an optical detector 4, and utilizes the total reflection. The measurement optical system 2 is an infinity-corrected positive lens comprising an optical member 2a having a plane orthogonal to an optical axis X of the measurement optical system 2 in a front focal position F<SB>F</SB>, used for a projection optical system for irradiating a sample S with measurement light on one side though the optical axis X of the measurement optical system 2, and used for a photometric optical system for capturing reflection light from the sample S on the other side. The light source 3 is disposed in an entrance pupil position F<SB>B</SB>on the projection optical system side or a conjugate position of the entrance pupil position F<SB>B</SB>, and moved along a straight line orthogonal to the optical axis on an entrance pupil plane or a conjugate plane of the entrance pupil position F<SB>B</SB>while a distance from the optical axis is detected. The optical detector 4 is disposed in an exit pupil position F<SB>B</SB>on the photometric optical system side or a conjugate position of the exit pupil position F<SB>B</SB>. The optical measurement apparatus 1 is provided with a light source changing means 15 for changing various positions and modes of the light source 3. COPYRIGHT: (C)2009,JPO&INPIT
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