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发明名称
NOZZLE SYSTEM AND APPARATUS FOR PROCESSING SUBSTRATE COMPRISING THE SAME
摘要
申请公布号
KR100895321(B1)
申请公布日期
2009.05.07
申请号
KR20070112751
申请日期
2007.11.06
申请人
SEMES CO., LTD.
发明人
KIM, YI JUNG;SEO, KYUNG JIN;LEE, JEONG HOON;LIM, JUNG SOO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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