| 摘要 |
PROBLEM TO BE SOLVED: To improve the durability of metal diaphragms used in lamination on a diaphragm type compressor. SOLUTION: A diaphragm unit 30 includes a first diaphragm 32 on the side of a pressure chamber 21C, a second diaphragm 34 on the side of a pump chamber 22C, and an intermediate diaphragm 36 between them, which are tightly laminated on each other. Each diaphragm is a metal diaphragm formed by press-molding. The intermediate diaphragm 36 includes arc-shaped through-holes 37 at three positions formed at a constant pitch through it around a diaphragm center in the shape of arc. Each arc-shaped through-hole 37 has a cut 38 extended to reach a diaphragm outer circumferential edge. Excessive lubricant between the diaphragms is pushed out to penetrate into the arc-shaped through-holes 37 as the diaphragms are bent. COPYRIGHT: (C)2009,JPO&INPIT |
