摘要 |
PROBLEM TO BE SOLVED: To provide an optical measuring apparatus capable of efficiently using light energy and speeding up measurements. SOLUTION: When a light source 101 irradiates a light beam toward a cone mirror 102, light is reflected in a radial pattern in the direction of an angle of 90°by a reflecting part of a conical surface 104, including at least a top part 103 of the cone mirror 102. Light 107 of a first region in the radial light is directly outputted toward an object 110. A light-section line is formed in the object 110 by the first region light. Light 108 of a second region in the radial light is reflected in the direction of an angle of 90°by a first reflecting mirror 105, reflected in the direction of an angle of 90°by a second reflecting mirror 106, and outputted toward another part of the object 110. A light-section line is formed in the another part of the object 110 by the second region light 108. COPYRIGHT: (C)2009,JPO&INPIT
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