| 摘要 |
PROBLEM TO BE SOLVED: To measure accurately a surface shape, even in the case of a specimen having a mirror surface mixed with a diffusion surface. SOLUTION: A floodlighting plate 2 diffuses each light from light sources 1-1 to 1-3 having each different light distribution characteristic by a large projection part 2a and a small projection part 2b, and floodlights it to a specimen 4. An angle measuring part 5b calculates a floodlighting angleθL based on the intensity ratio of each light reflected by the large projection part 2a of the floodlighting part 2, reflected on the specimen 4 imaged by an imaging part 3, relative to each light distribution characteristic. A trigonometry measuring part 5c measures the surface shape of the specimen 4 by trigonometry with a base line length Lb, an imaging angleθc and the floodlighting angleθL. An optical cutting method measuring part 5f controls a slit light emission part 7 for floodlighting to the specimen 4 so as to emit slit light, and measures by a shade on the specimen 4. A selection part 5e determines whether the surface is a diffusion surface or a mirror surface based on existence of recognition of the small projection part 2b reflected on the specimen 4, and selects an optical cutting method or trigonometry to measure the surface shape. This invention can be applied to a shape measuring device. COPYRIGHT: (C)2009,JPO&INPIT
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