| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor apparatus capable of inspecting characteristics by a probe with a low load without scraping off an insulating layer coating a pad electrode, and to provide a method of inspecting the same and an anisotropic conductive film. SOLUTION: In a semiconductor apparatus 100, an anisotropic conductive layer 16 is formed on a surface of a pad electrode 2. The anisotropic conductive layer 16 has a lower layer 14 contacting with the pad electrode 2, and an upper layer 12 contacting with the lower layer 14. The lower layer 14 has conductive characteristics, and includes a first filler group 6 whose pad electrode 2 side end has an acute angle. The upper layer 12 has conductive characteristics, and includes a second filler group 10 whose lower layer 14 side end has an angle larger than that of the first filler group 6. The first filler group 6 is formed by a material harder than an insulating layer 4 coating the surface of the pad electrode 2. When a probe 18 is pressed, the first filler group 6 breaks and penetrates the insulating layer 4 to conduct the probe 18 to the pad electrode 2. COPYRIGHT: (C)2009,JPO&INPIT
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