发明名称 |
DIFFRACTION GRATING STRUCTURE AND METHOD FOR MANUFACTURING SAME |
摘要 |
A diffraction grating structure comprises a substrate having a first surface and a second surface opposite to the first surface. A first grating is defined on the first surface and a second grating is defined on the second surface. The first grating includes a plurality of first grooves and has a first grating period. The second grating includes a plurality of second grooves and has a second grating period. The first groove and the second groove are formed by a fast tool servo system.
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申请公布号 |
US2009116110(A1) |
申请公布日期 |
2009.05.07 |
申请号 |
US20080192031 |
申请日期 |
2008.08.14 |
申请人 |
HON HAI PRECISION INDUSTRY CO., LTD. |
发明人 |
CHANG JEN-TSORNG |
分类号 |
G02B27/44;B23P15/12;G02B5/18 |
主分类号 |
G02B27/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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