发明名称 |
Particle-Optical Component |
摘要 |
The present invention relates to a particle-optical component comprising a first multi-aperture plate, and a second multi-aperture plate forming a gap between them; wherein a plurality of apertures of the first multi-aperture plate is arranged such that each aperture of the plurality of apertures of the first multi-aperture plate is aligned with a corresponding aperture of a plurality of apertures of the second multi-aperture plate; and wherein the gap has a first width at a first location and a second width at a second location and wherein the second width is by at least 5% greater than the first width. In addition, the present invention pertains to charged particle systems and arrangements comprising such components and methods of manufacturing multi aperture plates having a curved surface.
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申请公布号 |
US2009114818(A1) |
申请公布日期 |
2009.05.07 |
申请号 |
US20060991546 |
申请日期 |
2006.09.06 |
申请人 |
CARL ZEISS SMT AG;APPLIED MATERIALS ISRAEL LTD. |
发明人 |
CASARES ANTONIO;KNIPPELMEYER RAINER;KEMEN THOMAS;BAYER THOMAS;FRITZ GEORG;GRESCHNER JOHANN;KALT SAMUEL |
分类号 |
G01N23/00 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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