| 摘要 |
To eliminate unrequited maintenance by re-executing the sequence that is the cause of an error in a substrate processing apparatus. The system is provided with a processing chamber that processes a substrate, a carrier that carries the substrate, and a first controller that controls the carrier in accordance with a predetermined carrying sequence composed of a plurality of sequences, wherein if an error occurs while the carrier is carrying the substrate, after the first controller temporarily suspends an execution of the carrying sequence, it suspends the processing upon receipt of the stop processing and re-executes the sequence that is the cause of the error occurrence out of the carrying sequence upon receipt of the retry processing.
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