AMIDOXIME COMPOUNDS AS CHELATING AGENTS IN SEMICONDUCTOR PROCESSES
摘要
<p>The present invention is a composition and cleaning method for use in semiconductor processes wherein the compositions comprises at least one amidoxime compound.</p>
申请公布号
WO2009058288(A1)
申请公布日期
2009.05.07
申请号
WO2008US12254
申请日期
2008.10.29
申请人
EKC TECHNOLOGY, INC.;LEE, WAI, MUN;SCIALDONE, MARK, A.;ANDERSON, ALBERT, G.
发明人
LEE, WAI, MUN;SCIALDONE, MARK, A.;ANDERSON, ALBERT, G.
