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发明名称
METHOD FOR FABRICATING ISOLATION
摘要
申请公布号
KR20090044647(A)
申请公布日期
2009.05.07
申请号
KR20070110831
申请日期
2007.11.01
申请人
HYNIX SEMICONDUCTOR INC.
发明人
KIM, EUN JEONG;KU, JA CHUN;AHN, SANG TAE
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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