发明名称 APPARATUS FOR FORMING THIN FILM TRANSISTOR ARRAY PANEL, AND ITS METHOD
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for reducing a light leak current of a thin film transistor, and its method. SOLUTION: A method for manufacturing a thin film transistor array panel comprises steps of (i) forming a patterned first conduction layer containing a gate line and a shield pattern on a substrate, (ii) forming a gate insulating layer on the patterned first conduction layer and the substrate, (iii) forming a patterned semiconductor layer on the gate insulating layer, (iv) forming a patterned second conduction layer having a source and a drain on the patterned semiconductor layer and electrically connecting a data line with the source, (v) forming a patterned protecting layer on the patterned second conduction layer and the substrate, and (vi) forming a patterned transparent conduction layer on the patterned protecting layer. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009099977(A) 申请公布日期 2009.05.07
申请号 JP20080251059 申请日期 2008.09.29
申请人 AU OPTRONICS CORP 发明人 SHIH CHING-CHIEH;LEE YEONG-SHYANG;HSU TSUNG-YI;GAN FENG-YUAN
分类号 H01L29/786;G09F9/30 主分类号 H01L29/786
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