| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus for inspecting semiconductor elements at narrow pitches with a stable contact property and a satisfactory assembling property. SOLUTION: The present invention relates to: a probe card using a probe sheet 6, lined with a metal sheet, which has a first contact terminal 4 that makes electrical contact with electrodes of objects for inspection formed at narrow pitches, a wire extending from the first contact terminal, and a second contact terminal 5 that makes electrical contact with the wire, both of the contact terminals being formed with use of etching holes of crystalline members; and a method for inspecting (method for manufacturing) semiconductor devices with use of the probe card. COPYRIGHT: (C)2009,JPO&INPIT
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