| 摘要 |
The present invention provides a resonator capable of varying its resonance frequency of good performance with a low dispersion at a high manufacturing yield and a low cost. The resonator comprises a fixed electrode 1; a movable electrode 3 arranged with a predetermined distance apart from and parallel to the fixed electrode; a plurality of conductive leaf springs 2 with conductive property, all of which are bent outward or inward beforehand, arranged parallel apart from each other wherein, one end of each leaf spring is integrated into the fixed electrode and the other end of each leaf spring is integrated into the movable electrode; and an actuator 6 attached to the movable electrode for deforming the leaf springs by pushing or pulling the movable electrode.
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