| 摘要 |
A cleaning apparatus includes a plurality of air nozzles that discharge air from above each of the distal ends of a suction nozzle and a discharge nozzle, the suction nozzle sucking in at least some of reaction liquid undergoing a heterogeneous reaction, the discharge nozzle discharging a predetermined B/F cleaning fluid, the air nozzles being provided corresponding respectively to a plurality of pairs of the suction and the discharge nozzles. The apparatus includes an air supply unit that supplies air to the plurality of air nozzles at a time; a plurality of pressure sensors each of which detects a pressure of air which is supplied by the air supply unit and which is in the vicinity of each proximal end of the air nozzles; and a control unit that individually controls the B/F-cleaning-fluid discharging operation of the discharge nozzles based on the respective detected pressures and changes in the pressures.
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