发明名称 Seal ring structure with improved cracking protection and reduced problems
摘要 An integrated circuit structure includes a lower dielectric layer; an upper dielectric layer over the lower dielectric layer; and a seal ring. The seal ring includes an upper metal line in the upper dielectric layer; a continuous via bar underlying and abutting the upper metal line, wherein the continuous via bar has a width greater than about 70 percent of a width of the upper metal line; a lower metal line in the lower dielectric layer; and a via bar underlying and abutting the lower metal line. The via bar has a width substantially less than a half of a width of the lower metal line.
申请公布号 US2009115024(A1) 申请公布日期 2009.05.07
申请号 US20070933931 申请日期 2007.11.01
申请人 发明人 JENG SHIN-PUU;HSU SHIH-HSUN;HOU SHANG-YUN;TSAI HAO-YI;YU CHEN-HUA
分类号 H01L23/52 主分类号 H01L23/52
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