<p>A main rotating section (15) which rotates with a main shaft (13) at the center is provided with a plurality of sub-rotating sections (16), and each sub-rotating section (16) has a plurality of work holders (17). A work (W) held by the work holder (17) rotates on its own rotating shaft (46), while rotating with the main shaft (13) at the center and rotating with a sub-shaft (36) at the center by rotation of the main rotating section (15) and sub-rotating sections (16). Films are formed by making surfaces of the works (W) sequentially face a target (23).</p>
