发明名称 SYSTEMS AND METHODS FOR LASER PROCESSING DURING PERIODS HAVING NON-CONSTANT VELOCITIES
摘要 <p>A method is disclosed for on-the-fly processing at least one structure of a group of structures with a pulsed laser output. The method includes the steps of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity, and applying the pulsed laser output to the at least one structure of the group of structures during the step of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity.</p>
申请公布号 KR20090045260(A) 申请公布日期 2009.05.07
申请号 KR20097003613 申请日期 2009.02.20
申请人 GSI GROUP CORPORATION 发明人 JOHNSON SHEPARD D.;GU BO
分类号 H01L21/82;B23K26/06;B23K26/40;H01L21/768 主分类号 H01L21/82
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