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发明名称
METHOD FOR PREPARING COMPOUND SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
KR20090044707(A)
申请公布日期
2009.05.07
申请号
KR20070110925
申请日期
2007.11.01
申请人
SILTRON INC.
发明人
KIM, DOO SOO;KIM, YONG JIN;LEE, HO JUN;LEE, DONG KUN;KIM, JI HOON
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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