发明名称 NONVOLATILE SEMICODUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 <p>A non-volatile semiconductor device includes a tunnel insulating film including a ridge and a valley, and a nano floating gate including a nano dot. The ridge and the valley are alternately arranged by a given interval. The nano dot is disposed over the valley of the tunnel insulating film.</p>
申请公布号 KR20090044577(A) 申请公布日期 2009.05.07
申请号 KR20070110717 申请日期 2007.10.31
申请人 HYNIX SEMICONDUCTOR INC. 发明人 YI, JAE YUN
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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