发明名称 VERTICAL TRANSISTOR AND METHOD FOR FORMING THE SAME
摘要 A vertical transistor and a method for forming the same. The vertical transistor includes a semiconductor substrate having pillar type active patterns formed on a surface thereof; first junction regions formed in the surface of the semiconductor substrate on both sides of the active patterns; screening layers formed on sidewalls of the first junction regions; second junction regions formed on upper surfaces of the active patterns; and gates formed on sidewalls of the active patterns including the second junction regions to overlap with at least portions of the first junction regions.
申请公布号 US2009114978(A1) 申请公布日期 2009.05.07
申请号 US20070953917 申请日期 2007.12.11
申请人 CHA SEON YONG 发明人 CHA SEON YONG
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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