发明名称 WATER SOLUBLE CUTTING FLUID
摘要 PROBLEM TO BE SOLVED: To provide a water soluble cutting fluid capable of obtaining slurry having excellent lubricating property without increasing the viscosity of the slurry and abrasive grain slurry containing the same. SOLUTION: The water soluble cutting fluid contains a copolymerizable polyether (A) obtained by adding tetrahydrofuran and a 2-3C alkylene oxide to a≤24C compound (a) having 1-8 active hydrogen atoms in one molecule. The abrasive grain slurry is formed by containing the water soluble cutting fluid and the abrasive grains having 1-50μm volume average particle diameter, wherein the weight ratio of the water soluble cutting fluid to the abrasive grain is (1:0.5) to (1:2). COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009097004(A) 申请公布日期 2009.05.07
申请号 JP20080245537 申请日期 2008.09.25
申请人 SANYO CHEM IND LTD 发明人 YAMADA YASUHIRO;KATSUKAWA YOSHITAKA
分类号 C10M173/02;B24B27/06;C10M103/06;C10M105/58;C10M105/72;C10M107/34;C10N20/06;C10N30/06;C10N40/22;C10N40/32;H01L21/304 主分类号 C10M173/02
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