LIQUID METAL ION SOURCE, SECONDARY ION MASS SPECTROMETER, SECONDARY ION MASS SPECTROMETRIC ANALYSIS METHOD AND USE THEREOF

摘要

The invention relates to a liquid metal ion source, a secondary mass spectrometer, and an associated analysis method and the use thereof. The invention particularly relates to a mass spectrometric method according to the Gentle SIMS (G-SIMS) method. A liquid metal ion source is used, comprising a first metal having an atomic weight = 190 U and another metal having an atomic weight = 90 U. According to the invention, one of the two types of ions are alternately filtered out of the primary ion beam for the G-SIMS method and directed at the target as mass-pure primary ion beam.