| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid treatment device capable of immediately and precisely measuring concentration of chemicals when the concentration of a treatment liquid containing two types of chemicals or more is measured and also, of precisely measuring the concentration of chemicals when the concentration of a treatment liquid containing relatively light concentration of chemicals is measured; and a treatment liquid supply method therefor. SOLUTION: The liquid treatment device includes a treatment section 80 for treatment of an object to be treated by a treatment liquid; a supply passage 1 connected to the treatment section 80, for guiding a treatment liquid to the treatment section 80; a solvent supply section 7 for supplying a solvent to the supply passage 1; and a chemicals supply section 5 for supplying chemicals to the supply passage 1 through a chemicals supply passage 6 to produce chemicals diluted by the solvent. A measurement section 10 for measuring electrical conductivity of the chemicals diluted by the solvent is located on the downstream side of connection places 25a, 35a, 45a on the supply passage 1, to which the chemicals supply passage 6 is connected. An additional chemicals supply section 11 for supplying additional chemicals different from the chemicals is connected to the downstream side of a measurement place 10a at which the measurement section 10 is located out of the supply passage 1, through the additional chemicals supply passage 3. COPYRIGHT: (C)2009,JPO&INPIT
|
