METHOD OF COATING METALLIC MATERIAL

摘要

Disclosed is a coating method of tungsten to metal substrate comprising the steps of: anodizing a metal substrate including Al or Al-alloy to form an anodic oxidation layer, electroplating or electroless plating the metal substrate to form a tungsten layer on the anodic oxidation layer, and heating. By the coating method, the product manufactured by Al or Al-alloy has a high corrosion resistant, plasma resistant, and heat- and abrasion resistant, resulting in improvement of lifetime and reduction of contaminant of an autoclave, electrode or its accessories in semiconductor industry.