发明名称 ANALYSIS METHOD USING X-RAY SPECTRUM
摘要 PROBLEM TO BE SOLVED: To provide a method for accurately measuring and displaying the shape of X-ray spectrum waveforms as a whole, starting from the background level and going over the peaks, and until reaching the background level again, with a single measurement, in the required minimum length of time. SOLUTION: When performing counting for "to" as time interval in a spectral diffraction position, the standard deviation Eo for the dispersion in the count N of X-ray total values which does not include statistical fluctuation is Sqrt (N). In a spectral diffraction position where X-ray intensity is high, if the dispersion is greater than a certain degree Er (indicated allowable error), the counting is performed for "tm" time interval longer than "to", to increase the total value to a count Nm. Although the standard deviation Em of Nm is greater than Er, X-ray total values Nd actually used for spectrum display are standardized as total values of "to" interval time; and hence the dispersion Em is also standardized to Ed, which becomes equal to or smaller than Er. Accordingly, dispersions in displayed spectra, at all spectral diffraction positions are equal to or smaller than Er. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009097957(A) 申请公布日期 2009.05.07
申请号 JP20070268963 申请日期 2007.10.16
申请人 JEOL LTD 发明人 KAWABE KAZUYASU
分类号 G01N23/225 主分类号 G01N23/225
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