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发明名称
Ion sources, systems and methods
摘要
Ion sources, systems and methods are disclosed.
申请公布号
US2009114840(A1)
申请公布日期
2009.05.07
申请号
US20060600873
申请日期
2006.11.15
申请人
WARD BILLY W;NOTTE IV JOHN A;FARKAS III LOUIS S;PERCIVAL RANDALL G;HILL RAYMOND
发明人
WARD BILLY W.;NOTTE, IV JOHN A.;FARKAS, III LOUIS S.;PERCIVAL RANDALL G.;HILL RAYMOND
分类号
H01T23/00
主分类号
H01T23/00
代理机构
代理人
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