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发明名称
METHOD FOR FABRICATING VERTICAL CHANNEL SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20090044860(A)
申请公布日期
2009.05.07
申请号
KR20070111129
申请日期
2007.11.01
申请人
HYNIX SEMICONDUCTOR INC.
发明人
KANG, HYE RAN;KIM, KWANG OK
分类号
H01L29/78;H01L21/027
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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