| 摘要 |
To improve the assembling efficiency of a urbo-molecular pump having a structure in which the outside diameter of a rotor blade on the exhaust port side is smaller than the outside diameter of a rotor blade on the intake port side. Spacer rings 31f to 31h are set to a threadedly grooved spacer 3. Next, a moving section is inserted along the inner wall of a beanng section of a base 24 from the upside and is fixed. Thereafter, the spacer ring 31f to 31h are raised to provide a clearance between the spacer ring 31h and the threadedly grooved spacer 3. A halved stator blade 30 is inserted between rotor blades 9 via this clearance. After insertion, the spacer ring 31h is lowered, and the stator blade 30 is held by the threadedly grooved spacer 3 and the spacer ring 31h and is fixed. In the same way, the stator blade 30 is inserted between the rotor blades 9 via a clearance between the spacer ring 31h and the spacer ring 31g and a clearanoe between the spacer ring 31g and the spacer ring 31f.
|
