Method for determining deflection of capacitive driven actuator, involves subjecting resonant circuit with excitation frequency, and detecting changing resonant frequency of resonant circuit

摘要

The method involves subjecting resonant circuit (16) with an excitation frequency, and detecting the changing resonant frequency of the resonant circuit, which changes with deflection due to capacitance of an actuator (12). The capacitance of the actuator is determined by the changing resonant frequency of the resonant circuit, and the deflection of the actuator is determined by the determined capacitance. An independent claim is included for a device for determining deflection of a capacitive driven actuator.