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发明名称
METHOD FOR CONTROL OF TRANSMITTANCE OF PHOTOMASK USING BLOCK COPOLYMER
摘要
申请公布号
KR20090044767(A)
申请公布日期
2009.05.07
申请号
KR20070111010
申请日期
2007.11.01
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
DOH, JONG GUL;KIM, BYUNG GOOK;LEE, MYOUNG SOO;LEE, SUK HO
分类号
G03F7/00;G03F1/68;G03F7/004
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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