Actuator device with a microwave position sensor

摘要

The device has a linearly movable actuator element (14) and a microwave position measurement device on which the actuator element produces a pressure wave as it approaches with a high frequency microwave antenna arrangement (43) for sending and receiving microwaves at least partly reflected by the actuator element. A dielectric protective cover (60) mechanically protects the antenna arrangement and is decoupled from it by a separating distance (69) in which the cover can deform under the pressure wave's effect.