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发明名称
THROUGHPUT ENHANCEMENT FOR SCANNED BEAM ION IMPLANTERS
摘要
申请公布号
EP2054916(A2)
申请公布日期
2009.05.06
申请号
EP20070811293
申请日期
2007.08.13
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
EISNER, EDWARD;VANDERBERG, BO
分类号
H01J37/147;H01J37/302
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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