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发明名称
SUBSTRATE PROCESSING APPARATUS AND METHOD OF CLEANING FOR THE SAME
摘要
申请公布号
KR100895862(B1)
申请公布日期
2009.05.06
申请号
KR20070102488
申请日期
2007.10.11
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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