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发明名称
METHOD FOR ETCHING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20090043034(A)
申请公布日期
2009.05.06
申请号
KR20070108651
申请日期
2007.10.29
申请人
HYNIX SEMICONDUCTOR INC.
发明人
SHIN, SU BUM;KIM, SANG HEON
分类号
H01L21/302;H01L21/02
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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