METHOD AND DEVICE FOR PRODUCING A COATING

摘要

The present invention relates to a coating device, comprising a plasma generating chamber with a housing for the collection of the plasma produced therein, a nozzle duct formed by the housing with an outlet from the housing, an electrode arranged in the nozzle duct, an ionized gas inlet for the inlet of a gas to be ionized in the plasma generating chamber with a volume flow of 15 to 50 l/min, a relaxation chamber, comprising a precursor feed, being spaced 1 to 25 mm, preferably 1 to 7 mm from the outlet of the housing of the plasma generating chamber.