| 摘要 |
<p>The substrate (10, 20) of the microreactor comprises first and second layers (11, 21; 12, 22) of ceramic material. The first layer (11, 21) includes a crystalline ceramic and/or a glass in its matrix. It includes a further crystalline ceramic. The hollow chamber structure (14, 24) is formed such that the wall region of the crystals and/or crystal agglomerates of the second component in the first layer (11, 21) are at least locally etched-out. The hollow chamber structure is a pore- or tube structure (i.e. it has porosity). Catalytic material arranged in the hollow chamber structure is coated onto or deposited into it by deposition from the gas phase. The catalyst is selected from: platinum, palladium, nickel and rhodium. The etched hollow chamber structure only exists in a predetermined region of the first layer and reaches a predetermined depth in it. The second component comprises Al 2O 3crystallites and/or a different crystalline compound. Up to 40 vol% of it is contained in the matrix. In the wall regions the crystals and/or crystalline agglomerate preferably contain silicon and/or lead. The substrate has a second layer. The first- and at least one second layer are made using LTCC (low temperature co-fired ceramic) technology. A heater is included in a layer above or below the hollow structure in the first layer. At a wall of the hollow structure where reaction takes place, converting an educt into a product, the educt is caused to flow past this location. Further details of the arrangement are provided. A chemical sensor is included to measure the yield of the conversion process. An independent claim IS INCLUDED FOR the method of making the corresponding microreactor and its substrate.</p> |
