发明名称 RUGGED MOVING-MIRROR INTERFEROMETER
摘要 A moving mirror interferometer consists of a back-to-back double mirror, operatively interposed in the paths of beams from a beamsplitter/parallel reflecting mirror combiner, and a corner cube retroreflector. One beam component from the combiner is directed toward the retroreflector, and arrives therefrom at one side of the double mirror rotated 180 DEG about its central axis; the other component from the combiner arrives at the opposite side of the double mirror without axial rotation. Alignment in the interferometer is insensitive to shearing or tilting of the optical components; the components may be semi-rigidly mounted for resilient deflection, so as to isolate them against distortion of the supporting structure, and dynamic beam path-length variation may optimally be produced by moving the corner cube retroreflector, the back-to-back double mirror, or both.
申请公布号 EP0862725(B1) 申请公布日期 2009.05.06
申请号 EP19960942027 申请日期 1996.11.20
申请人 MKS INSTRUMENTS, INC. 发明人 SOLOMON, PETER, R.
分类号 G01B9/02 主分类号 G01B9/02
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