发明名称 |
Micro surface shape measuring probe |
摘要 |
<p>There is disclosed a micro surface shape measurement probe including a probe shaft 4 having at a distant end thereof a probe member 2 for contacting an object 1 to be measured, a probe body 21 provided with support means for movably supporting the probe shaft 4 in a non-contact manner, a pressing device for pressing and moving the probe shaft 4 toward the object 1 to be measured, a piezoelectric sensor 8a incorporated in the probe body 21 so that a reactive force acts to a pressing force applied to the probe shaft by the pressing device, a load detecting device 8b to measure a load acting on the piezoelectric sensor, a control device 9 for adjusting the pressing force applied by the pressing device based on the load detected by the load detecting device, and a displacement amount measuring device for measuring a position of the probe member 2 in contact with the object 1 to be measured by the pressing force adjusted by the control device 9.</p> |
申请公布号 |
EP1909060(B1) |
申请公布日期 |
2009.05.06 |
申请号 |
EP20080000507 |
申请日期 |
2006.11.30 |
申请人 |
RIKEN |
发明人 |
OMORI, HITOSHI;WATANABE, YUTAKA;MORITA, SHINYA;UEHARA, YOSHIHIRO;LIN, WEIMIN;KATAHIRA, KAZUTOSHI |
分类号 |
G01B5/012;B23Q17/20;G01B11/00;G01B21/00;G01L1/16 |
主分类号 |
G01B5/012 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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