发明名称 EXPOSURE MASK AND METHOD FOR FABRICATING THIN-FILM TRANSISTOR
摘要 An exposure mask includes a transparent substrate; a first pattern portion formed on the transparent substrate using at least one light-shielding pattern having a predetermined shape; and a translucent layer which is formed at a section including a first pattern region having the first pattern portion, which allows exposure light to pass therethrough, and which has a transmittance greater than that of the light-shielding pattern.
申请公布号 KR20090043440(A) 申请公布日期 2009.05.06
申请号 KR20080100711 申请日期 2008.10.14
申请人 SEIKO EPSON CORPORATION 发明人 MIYATA TAKASHI
分类号 H01L21/027;G03F1/00;G03F1/68;H01L21/266;H01L21/336;H01L29/786 主分类号 H01L21/027
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