发明名称 ANGULAR VELOCITY SENSOR
摘要 An angular velocity sensor detects an angular velocity of an object. The angular velocity sensor includes a detecting element, and a driving unit. The detecting element includes a supporting part, a first arm extending from the supporting part and being adapted to be fixed to the object, a second arm extending from the supporting part, and a first weight connected with the second arm. The second arm has substantially a U-shape and includes a first extending part extending from the supporting part, a first facing part facing the first extending part and extending in parallel with the first extending part, and a first joint part joining the first extending part to the first facing part. The first weight is connected with the facing part of the second arm. The driving unit includes first to fourth drivers. The first driver is provided at the first extending part and extends and contracts the first extending part. The second driver is positioned at the first extending part at a more outer circumference of the U-shape of the second arm than the first driver. The second driver extends and contracts the first extending part. The third driver is positioned at the first facing part, and extends and contracts the first facing part. The fourth driver is positioned at the first facing part at a more inner circumference of the U-shape of the second arm than the third driver, and extends and contracts the first facing part. This angular velocity sensor has a small size along a rotation axis about which an angular velocity to be detected.
申请公布号 EP2056069(A1) 申请公布日期 2009.05.06
申请号 EP20070807499 申请日期 2007.09.19
申请人 PANASONIC CORPORATION 发明人 TERADA, JIROU
分类号 G01C19/56;H01L41/08 主分类号 G01C19/56
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