发明名称 |
Hybrid silicon-on-insulator waveguide devices |
摘要 |
Device designs and techniques for providing efficient hybrid silicon-on-insulator devices where a silicon waveguide core or resonator is clad by the insulator and a top functional cladding layer in some implementations of the designs.
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申请公布号 |
US7528403(B1) |
申请公布日期 |
2009.05.05 |
申请号 |
US20060411447 |
申请日期 |
2006.04.25 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
BORSELLI MATTHEW;JOHNSON THOMAS J;PAINTER OSKAR |
分类号 |
H01L29/06;H01L27/15;H01L29/22;H01L29/24;H01L29/26;H01L31/0328;H01L31/0336;H01L31/072;H01L31/109;H01L31/12;H01L33/00 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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