发明名称 Hybrid silicon-on-insulator waveguide devices
摘要 Device designs and techniques for providing efficient hybrid silicon-on-insulator devices where a silicon waveguide core or resonator is clad by the insulator and a top functional cladding layer in some implementations of the designs.
申请公布号 US7528403(B1) 申请公布日期 2009.05.05
申请号 US20060411447 申请日期 2006.04.25
申请人 CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 BORSELLI MATTHEW;JOHNSON THOMAS J;PAINTER OSKAR
分类号 H01L29/06;H01L27/15;H01L29/22;H01L29/24;H01L29/26;H01L31/0328;H01L31/0336;H01L31/072;H01L31/109;H01L31/12;H01L33/00 主分类号 H01L29/06
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