发明名称 Apparatus and method for measuring the temperature of substrates
摘要 An apparatus for measuring an object temperature of an object, and including at least one heating apparatus having at least one heating element for heating an object via electromagnetic radiation. Also included is at least one first radiation detector that detects radiation coming from the object within a first field of vision, and, for determining correction parameters, a measuring device that detects the electromagnetic radiation that reaches the first field of vision from the at least one heating element up to a proportionality factor or a known intensity-dependent function.
申请公布号 US7528348(B2) 申请公布日期 2009.05.05
申请号 US20040021915 申请日期 2004.12.22
申请人 MATTSON TECHNOLOGY, INC. 发明人 HAUF MARKUS
分类号 G01J5/06;F27B5/18;G01J5/00;G01J5/08 主分类号 G01J5/06
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